MEMS 1082/ME2082 Syllabus (Spring, 2012)
General Information
o
Steve P. Beeby, Graham
Ensel, Michael Kraft, “MEMS Mechanical Sensors” ISBN: 1580535364, Publisher:
Artech House Publishers (May 1, 2004)
o
Ilene J. Busch-Vishniac,
“ Electromechanical Sensors and Actuators”, ISBN 0-387-98495-X, TK7872.T6B87,
Springer-Verlag New York, 1999
o
Tai-Ran Hsu, “MEMS &
Microsystems: Design and Manufacture,” ISBN 0-07-239391-2, McGraw-Hill Higher
Education, TK7874.H794, 2002
office: 611 Benedum Hall, hours:
Tuesday Wednesday,: 2:00pm -4:00pm
phone: TBA
e-mail: qic7@pitt.edu
|
Week |
Lecture
Topic |
Reading |
Homework |
|
1 (1/4-1/7)
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|
·
Ch. 1; ·
App A.1; ·
2.1 -
2.4 ·
Transducer
Introduction (Lecture
1) |
|
|
Internet links |
Video
Demo
|
||
|
2 (1/9
- 1/13) |
Internet
links |
·
2.5 - 2.10 Video Demo ·
2.1 - resistors
(1.4 MB)
|
Chapter 2: 2.2[10
pts]. 2.3 [10 pts], 2.13 [10 pts], 2.15 [10 pts], 2.20 [10 pts], Homework1 solution |
|
3-4 (1/18
– 1/27) |
17 Monday
Dr. Martin Luther King’s birthday observance(University closed) |
(due Fri, 1/27) Homework2
solution Additional Homework2-1 |
|
|
·
diodes
|
|||
|
Internet
links |
Video
demo
|
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|
5 (1/31
- 2/4) |
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Ch. 4 |
Chapter 3: 3.13[10pts],
3.14 [10pts], 3.15[15pts],3.16[15pts],3.18 [15pts],3.17[15pts],3.20[20pts] (Due Fri, 2/3) Chapter 4: 4.4 [10 pts],
4.6 [30 pts], (due Fri, 2/10) Homework3-4 solution |
|
Internet Links |
Video
demo
|
||
|
6-7 (2/6
- 2/18) |
|
Ch.5 |
Chapter5: 5.2 [10
pts], 5.4 [10 pts], 5.6[10 pts], 5.8 [10 pts], Chapter5 Solution |
|
Internet Links |
Video
demo
|
||
|
8-9 (2/20
- 3/4) |
|
Capacitive
Sensors and actuators |
(due
Monday, 3/12) |
|
Internet Links |
Video
demo |
||
|
10 (3/4
- 3/11) |
Spring Recess for students (no classes); |
|
|
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11 (3/12
– 3/18) |
|
(due
Friday, 3/23)
|
|
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12-13 (3/19
– 3/30) |
|
(Due Friday, 3/30) |
|
|
Video Demo ·
How Bosch Piezoelectric Diesel Injector
Works |
|||
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14-15 (4/2-4/13) |
Internet Links
|
9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7 App
C Video
demo
|
(due
Friday, 4/13) Chapter9: 9.5 [10 pts], 9.9 [20 pts], 9.10[10 pts], 9.12[10pts] |
|
16 (4/16
- 4/20) |
Internet Links
|
Video
demo
|
Chapter10: 10.3 [10 pts], 10.5 [20 pts], 10.7
[10 pts], 10.8 [20pts] |
|
17 4/26-4/30 |
Final
week |