MEMS 1082/ME2082 Syllabus (Spring, 2012)

General Information

o   Steve P. Beeby, Graham Ensel, Michael Kraft, “MEMS Mechanical Sensors” ISBN: 1580535364, Publisher: Artech House Publishers (May 1, 2004)

o   Ilene J. Busch-Vishniac, “ Electromechanical Sensors and Actuators”, ISBN 0-387-98495-X, TK7872.T6B87, Springer-Verlag New York, 1999

o   Tai-Ran Hsu, “MEMS & Microsystems: Design and Manufacture,” ISBN 0-07-239391-2, McGraw-Hill Higher Education, TK7874.H794, 2002

office: 611 Benedum Hall, hours: Tuesday Wednesday,: 2:00pm -4:00pm
phone: TBA
e-mail:
qic7@pitt.edu

 

Week

Lecture Topic

Reading
Assignment and video Demo

Homework
Assignment

1

(1/4-1/7)

  • course introduction
  • electric circuit fundamentals

·         Ch. 1;

·         App A.1;

·         2.1 - 2.4

·         Transducer Introduction (Lecture 1)

·         Ch1. summary

Internet links

Video Demo

2

(1/9 - 1/13)

  • electric circuit fundamentals (continued)
  • input and output impedance
  • AC circuits introduction

 

Internet links

·         2.5 - 2.10

·         Chapter 2-1 Handouts

·         Chapter2-2

·         Chapter2-3

·         Ch.2 Circuit summary

Video Demo

·         2.1 - resistors (1.4 MB)

Homework1 

Chapter 2: 2.2[10 pts]. 2.3 [10 pts], 2.13 [10 pts], 2.15 [10 pts], 2.20 [10 pts],
2.28 [10 pts], 2.29 [20 pts], 2.36 [20 pts]
[100 points total]
(due Fri, 1/13)

 

Homework1 solution

3-4

(1/18 – 1/27)

17 Monday Dr. Martin Luther King’s birthday observance(University closed)


Chapter 3: 3.1 [10 pts], 3.5 [25 pts],
3.6 [10 pts], 3.11 [5 pts]

(due Fri, 1/27)

Homework2 solution

 

 

 Additional Homework2-1
(due Fri, 2/3)

·         diodes 

  • transistors
  • digital electronics
  • number codes
  • combinational logic

Internet links

·         semiconductor (IC) manufacturers and online resources

·         Electronics tutorial

·         nMOSFET (enhancement) Characteristic Curves

 

Video demo

5

(1/31 - 2/4)

 

  • system response (0th, 1st, 2nd order systems)
  • 2nd order system response
  • modeling analogies

Ch. 4

Chapter 3: 3.13[10pts], 3.14 [10pts], 3.15[15pts],3.16[15pts],3.18 [15pts],3.17[15pts],3.20[20pts]

(Due Fri, 2/3)

Chapter 4: 4.4 [10 pts], 4.6 [30 pts],
4.8 [10 pts], 4.10 [20 pts],
4.21 [15 pts], 4.29 [15 pts]

(due Fri, 2/10)

Homework3-4 solution

Internet Links

Video demo

6-7

(2/6 - 2/18)

  • operational amplifier
    • circuit analysis
    • applications
    • characteristics of real op amps

Ch.5

Chapter5-1handouts

Chapter5-2handouts

Chapter5-3handouts

Chapter5-4handouts

Chapter5 Summary

  Chapter5: 5.2 [10 pts], 5.4 [10 pts], 5.6[10 pts], 5.8 [10 pts],
5.10 [10 pts], 5.12[10 pts], 5.13 [10 pts], 5.16 [10 pts], 5.18 [20 pts]
[100 points total]

Chapter5 Solution
(due Fri, 2/23)

Design Problem1

Design Problem2

Design Problem3

Internet Links

Video demo

8-9

(2/20 - 3/4)

  •  Transduction based on energy storage in electrical field
  • Air –gap capacitive devices

Capacitive Sensors and actuators

Lecture 6-1

Lecture-6-2

Lecture 6-3

Homework 6

(due Monday, 3/12)

Internet Links

Video demo

10

(3/4 - 3/11)

Spring Recess for students (no classes);



11

(3/12 – 3/18)

  •  Transduction based on energy storage in electrical field
  • Electrostriction

Lecture 6-4

Lecture 6-5

Lecture 7-1

Design Problem 4

(due Friday, 3/23)



12-13

(3/19 – 3/30)

  • Piezoelectricity and pyroelectricity

Lecture 8-1

Lecture 8-2

Lecture8-3

Lecture8-4

Lecture8-5

Lecture8-6

Lecture8-7

Homework 7

Homework 8

(Due Friday, 3/30)

Video Demo

·         Piezoelectric device

·         Piezoelectric effect

·         How Bosch Piezoelectric Diesel Injector Works

·         Micromachined piezoelectric acoustic device

·         Piezoelectric Sensors

14-15

(4/2-4/13)

  • position measurement
    • switches
    • potentiometer
    • LVDT
    • digital encoder
  • stress/strain introduction
  • strain gages
  • Wheatstone bridge
  • strain gage rosette

Internet Links

  • thermocouple relations

9.1, 9.2, 9.3, 9.4, 9.5, 9.6, 9.7

App C

Chapter9-1handouts

LVDT Primer

Chapter9-2handputs

Chapter9-3handouts

Chapter9-4handouts

Chapter9-5handouts

Chapter9-6handouts

Chapter9 summary

Video demo

(due Friday, 4/13)

 

Chapter9: 9.5 [10 pts], 9.9 [20 pts], 9.10[10 pts], 9.12[10pts]
9.16 [15 pts], 9:19 [10pts], 9.20[10 pts], 9.21 [15 pts]
[100 points total]

16

(4/16 - 4/20)

  • motor fundamentals
  • stepper motor control
  • Solid state actuators

Internet Links

Chapter10-1handouts

Chapter10-2handputs

DCMotors dynamic model

Chapter10-3handouts

 

Video demo

Chapter10: 10.3 [10 pts], 10.5 [20 pts], 10.7 [10 pts], 10.8 [20pts]
10.10 [20 pts], 10.11 [10 pts], 10.13 [pts]
[100 points total]

17

4/26-4/30

Final week

Literature Review Project