IEEE NTC Technical
Committee (TC9): Nano-Metrology and Characterization
Nanotechnology involves the development and processing of
materials and systems at nanoscale. Thus accurate control of dimensions of
objects is important in nanotechnology. Nanometrology,
a subfield of metrology, concerns with science of measurements at nanoscale
level. The main research in this filed is to develop or create new measurement
techniques and standards to measure the physical parameters of nanomaterials
and nanodevices such as length or size, force, mass, electrical, magnetic and
other properties. Therefore, nanometrology plays a crucial role in producing
nanomaterials and devices with a high degree of accuracy and reliability in
nanomanufacturing. Some popular instrumental techniques can be used for measuring
or determining the parameters for nanostructures and nanomaterials including X-Ray
Diffraction, Transmission Electron Microscopy, High Resolution Transmission
Electron Microscopy, Scanning Probe Microscopy, Scanning Electron Microscopy,
Field Emission Scanning Electron Microscopy and etc. Nanocharacterization concerns
the theoretical and practical aspects of using the nanometrological instruments
to characterize the physical properties of nanomaterials, nanostructure, nanodevices,
and nanosystems.
The main goal of this technical committee is to recruit worldwide
researchers in the field of nano-metrology and characterization and encourage them
actively participate the activities of IEEE NTC, thus to increase the impact of
NTC sponsored conferences and to enhance the leadership of NTC in nanotechnology
and to expand the global presence of NTC.
The current member of this technical committee includes:
TC Chairs: |
Institution |
Country |
email |
|
1. Guangyong Li |
University of Pittsburgh |
USA |
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members |
|
|
|
|
2.Mike Adel |
KLA-Tencor |
USA |
||
3.K. C. Fan |
National Taiwan University |
Taiwan |
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4.Christofer Hierold |
Swiss Federal Institute of Technology |
Swiss |
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5.Steve Hummel |
Nanometrics, Inc. |
USA |
||
6.Gerd Jager |
Technical University Ilmenau |
Germany |
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7.Chih-Ming Ke |
Taiwan Semiconductor Manufacturing Company |
Taiwan |
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8.Yi-sha Ku |
Center for Measurement Standards |
Taiwan |
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9.Cheol Jin Lee |
Korea University |
Korea |
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10.Jon Opsal |
Therma-Wave, Inc. |
USA |
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11.K. S. Peng |
Center for Measurement Standards |
Taiwan |
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12.W. C. Wang |
National Tsing Hua University |
Taiwan |
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13.Peng Li |
National Cenetr for Nanoscience and Technology |
China |
lipeng@nanoctr.cn |
|
14. Liming Liu |
KLA-Tencor |
China |
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15. Lianqing Liu |
Shenyang Institute of Automation |
China |
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16.Fanan Wei |
Fuzhou University |
Taiwan |
weifanan@fzu.edu.c |